| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate |
1998-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63abc29c9fc91122a7282654bed278a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_571b25e064ebec2069f0546cd760ba5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cc7afa644cff5d901ccb4efab859e8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3f64e9ad8eeafc599a5375cf9309733 |
| publicationDate |
1999-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2779829-A1 |
| titleOfInvention |
APPARATUS AND METHOD FOR INSPECTING CONTACT FAULTS ON SEMICONDUCTOR DEVICES |
| abstract |
A system and method for inspecting contact faults for semiconductor devices and a method for manufacturing semiconductor devices are provided. Using digitized values for electronic signals detected using a scanning electron microscope, contacts can be inspected to identify faults, such as unopened contact holes. The contact fault inspection is carried out by comparing the detected value of the electronic signal coming from a unit surface including at least one contact hole with values representing the electronic signal which corresponds to a normal contact. |
| priorityDate |
1998-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |