| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
1995-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_863b40a02da21dd6542fe2e7a410bf6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dc515c048fca8f9a488128d445fee0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e8551231e78fa4220979c96240f1eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf3e3bd364b816797e8e0e4cdbc8a412 |
| publicationDate |
1995-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2720854-A1 |
| titleOfInvention |
Method of manufacturing semiconductor devices with aluminum wiring by etching and heating under vacuum. |
| abstract |
According to the process of the invention, one begins by forming a metallic film of aluminum or aluminum alloy on the surface of an insulating film on a substrate, then this metal film is dry etched and apply a pattern trace using a chlorine-based gas to form a metallic wiring pattern and finally the substrate with the metallic wiring pattern is heated under vacuum to release the chlorine which is attached to the pattern metal wiring. This improves the corrosion protection of the wiring pattern. |
| priorityDate |
1993-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |