| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c23a1323673a16fb6f1c1f6df4fe292b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-3412 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B19-00 |
| filingDate |
1993-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b5d40c1623961a550a060e3ade89831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa10b55503a22c3e3d602c278dd482a |
| publicationDate |
1994-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2700883-A1 |
| titleOfInvention |
Process for obtaining polymer with reduced permittivity |
| abstract |
The invention relates to a process for obtaining thermostable polymer with reduced permittivity. This process comprises, after the deposition of a solution of polymer in a solvent A, on a substrate S, the demixing of the layer previously produced, and then the evaporation of the solvent A. This process allows the production of a microporous layer of polymer thermostable whose permittivity is significantly reduced. The layers thus produced are particularly interesting as a support or insulator between the different levels of interconnections of the electronic devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6653358-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7109249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6630520-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6887910-B2 |
| priorityDate |
1993-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |