| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6dacaa0ceae8e4330441f7bb1f70cb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02661
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 |
| filingDate |
1985-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43b42d411f79f54f13710a20ed4578ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a5b44f3ba61a0a6dff4b3401d23edf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93afcf9e4488df09b738857fb8721454 |
| publicationDate |
1987-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2587543-A1 |
| titleOfInvention |
DEVICE FOR FORMING A SEMICONDUCTOR CRYSTAL |
| abstract |
IN A SEMICONDUCTOR CRYSTAL TAPPING DEVICE, A TANK 1 CONTAINING A SUBSTRATE 12 IS DEPRESSED UNDER ULTRA-VACUUM, AND A GAS CONTAINING A CONSTITUENT OF A SEMICONDUCTOR WHICH MUST DEVELOP ON THE SUBSTRATE IS INTRODUCED IN THE DRAFT TANK FROM AN EXTERNAL SOURCE OF GAS 8, 9. THE INFRARED RADIATION FROM AN INFRARED RADIATION EMISSION LAMP 31 ASSOCIATED WITH THE DRAFT TANK AND CONTROLLED BY A TEMPERATURE REGULATOR 21 IS DIRECTED TOWARDS AND ON THE SUBSTRATE WHOSE TEMPERATURE MUST BE MAINTAINED AT A PREDETERMINED SETPOINT VALUE. |
| priorityDate |
1984-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |