| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae3e800b17cb8127a0df7db8c070cf53 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2001-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2105-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2301-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2001-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C41-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 |
| filingDate |
1985-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43c6ad864fdee3aa488cffbabf23bfb4 |
| publicationDate |
1986-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2573219-A1 |
| titleOfInvention |
TRANSPARENT FILM IN ULTRAVIOLET FOR THE PROTECTION OF PHOTOLITHOGRAPHIC COVERS |
| abstract |
THE INVENTION RELATES TO PROTECTIVE FILMS. IT RELATES TO A FILM 12 INTENDED TO PROTECT A DRAWING 11 SHAPED ON A PHOTOLITHOGRAPHIC COVER 10. ACCORDING TO THE INVENTION, THE FILM 12 IS FORMED BY CELLULOSE ACETOBUTYRATE, AND HAS A THICKNESS BETWEEN 1 AND 5 MM. THIS MATERIAL ALLOWS THE USE OF WAVELENGTHS AS LOW AS 240 MM, ESPECIALLY WHEN THE FILM HAS ANTI-REFLECTIVE COATINGS. APPLICATION TO THE MANUFACTURING OF SEMICONDUCTOR DEVICES. |
| priorityDate |
1984-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |