| abstract |
SOURCE OF IONS WITH CYCLOTRONIC RESONANCE OF ELECTRONS IN WHICH A PLASMA IS CONFINED IN A MAGNETIC CONFIGURATION INCLUDING A FIRST GROUP OF COILS 11 BEING LOCATED IN THE PLAN DEFINED BY THE WATERPROOF WINDOW 13 OF AN INJECTOR 8 HYPERFREQUENCY AND SURROUNDING THERE THE MAGNETIC FIELD CREATING AND CONFINING A PLASMA 10 AND A SECOND GROUP OF COILS 12 BEING FEED IN COUNTER-FIELD WITH RESPECT TO THE FIRST GROUP, SURROUNDING A SYSTEM FOR EXTRACTING 14 IONS. THE ION EXTRACTION IS CARRIED OUT IN A MAGNETIC FIELD CLEARLY LOWER THAN THAT CORRESPONDING TO THE CYCLOTRONIC RESONANCE. THE SAID SOURCE OF IONS FOUND MANY APPLICATIONS IN THE FIELDS OF SPUTTERING THIN LAYERS, MICRO-ENGRAVING, ION IMPLANTATION, ACCELERATORS, ETC. |