| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70aa9b350a2c58985716a27c03fe3af0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-3423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-3426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-075 |
| filingDate |
1982-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86a9951d01dcfa5b0799f4cc239e5883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06b8274fd29c62561b5e0a9dc819cf2c |
| publicationDate |
1983-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2517470-A1 |
| titleOfInvention |
LASER STIMULATED HIGH-DENSITY CURRENT ELECTRON GENERATOR AND METHOD OF MANUFACTURING SAME |
| abstract |
ELECTRON BEAM GENERATOR DESIGNED PARTICULARLY FOR LITHOGRAPHY APPLICATIONS ON SEMICONDUCTOR IN DIRECT WRITING INCLUDING A PHOTOEMISSIVE CATHODE, A MODULAR LASER TO LIGHT THE CATHODE AND AN OPTICAL TO CREATE AN OPTICAL DRAWING ON THE CATHOD. CATHODE 16 IS COMPOSED OF A TRANSPARENT SUBSTRATE 40 ON WHICH AN ELECTRICALLY CONDUCTIVE SEMI-TRANSPARENT FILM 46 IS DEPOSITED. THIS FILM IS COATED WITH A THIN LAYER OF A PHOTO-EMISSIVE SUBSTANCE 48 SUCH AS CESIUM ANTIMONIDE, SO THAT THE CATHODE EMITS A SENSITIVELY MONOCHROMATIC BEAM OF ELECTRONS WHEN ITS LASER ILLUMINATION. THE ELECTRON BEAM IS SHAPED ACCORDING TO THE OPTICAL DRAWING CREATED ON THE CATHODE AND, THROUGH SUCCESSIVE ELECTRONIC OPTICAL DEVICES, IS AGAIN CONFORM AND DIMENSIONED FOR USE FOR EXAMPLE IN LITHOGRAPHY MANUFACTURING OF SEMI-CONDUCTIONS OR VLSI CIRCUITS. |
| priorityDate |
1981-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |