http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2481838-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-826 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 1981-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95b7a475ebcfb111de9d8ed127f401e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4777e75d2ffcec372d40da7b03744a9d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fdaf19250480b704179714c0ae92471 |
| publicationDate | 1981-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | FR-2481838-A1 |
| titleOfInvention | PLASMA DEPOSITION APPARATUS FOR FORMING A FILM ON A SUBSTRATE |
| abstract | THE INVENTION RELATES TO A PLASMA DEPOSITOR HAVING A PLASMA FORMATION CHAMBER AND A SAMPLE CHAMBER WHICH ARE SEPARATELY ARRANGED. ACCORDING TO THE INVENTION, GASEOUS MATERIAL AND MICROWAVE POWER ARE INTRODUCED INTO THE PLASMA FORMATION CHAMBER 21 TO PRODUCE PLASMA THERE BY MICROWAVE DISCHARGE BY RESONANCE OF AN ELECTRON CYCLOTRON; THE PLASMA IS EXTRACTED TO THE SAMPLE CHAMBER 22 THROUGH A PORT 30; IN CHAMBER 22, THE PLASMA IS ACCELERATED BY THE EFFECT OF A DIVERGENT MAGNETIC FIELD TO IRRADIATE THE SURFACE OF SAMPLE 28 IN ORDER TO DEPOSIT A THIN FILM; A THIN FILM OF VERY GOOD QUALITY IS SHAPED WITH HIGH EFFICIENCY AND AT LOW TEMPERATURE, THEN THIN FILM MAY BE DEPOSITED ON A SUBSTRATE OF LOW HEAT RESISTANCE. THE INVENTION APPLIES IN PARTICULAR TO THE MANUFACTURE OF VARIOUS KINDS OF ELECTRONIC DEVICES. |
| priorityDate | 1980-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.