| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11175403979f4130bd911fc04847b2d7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-04 |
| filingDate |
1979-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1980-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FR-2456144-A1 |
| titleOfInvention |
METHOD AND DEVICE FOR DEPOSITING SEMICONDUCTOR LAYERS BY VACUUM EVAPORATION |
| abstract |
METHOD AND DEVICE FOR OBTAINING SEMICONDUCTOR LAYERS BY VACUUM THERMAL EVAPORATION. THE BASE PRODUCT IS BROUGHT INTO EVAPORATORS3 HEATED TO A TEMPERATURE LOWER THAN THE BOILING TEMPERATURE OF THE BASE PRODUCT. THE PRODUCT IS PROVIDED PERIODICALLY BY LOADING EACH OF THE EVAPORATORS 3. THE DOSE IS CHOSEN AS SUFFICIENT FOR THE UNIFORM COVERAGE OF THE USEFUL SURFACE OF THE EVAPORATOR 3 AND FOR ITS TOTAL EVAPORATION BEFORE THE FOLLOWING LOADING. THE NUMBER OF EVAPORATORS 3 IS MULTIPLE THAN THE NUMBER OF MAIN FRACTIONS IN THE BASE PRODUCT. APPLICATION: MANUFACTURE OF LARGE LENGTH AND SURFACE SEMICONDUCTOR LAYERS ON A SOFT SUBSTRATE. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4880960-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0283374-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2611746-A1 |
| priorityDate |
1979-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |