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filingDate 2016-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a4d89d2bd8466ecb06a5242220f58a5
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publicationDate 2018-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber FI-127463-B
titleOfInvention Artifact to determine resolution of imaging based on electromagnetic radiation and / or mechanical waves
abstract A test piece (101) is provided for determining the imaging resolution based on electromagnetic radiation, mechanical waves, or both. The test piece comprises layers (103, 104) on the substrate (102) and on the substrate. The layers comprise organic material and are stacked on top of each other in a partially overlapping manner such that the edge (107) of the first layer is arranged to cross the layers with the second edge (108). The layers form a three-dimensional surface topography in which the groove (111) defined by the first and second edges of the layers converges toward the intersection of the edges (112). The resolution is the minimum width of the converging groove whose imaging indicates that a predetermined criterion is met.
priorityDate 2016-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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