| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2336eb2c801a759be8d1a4ed5644026f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B37-014 |
| filingDate |
2004-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_248df842d6fd8ac32928cd3420421551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_501a2c9c34387ab976ff04a671beb749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a76023f96e0a7400ee8ae42dd55451af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97d9ab8f4dc01275248861c443520259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79b4c5901af86b3cff238274c644515c |
| publicationDate |
2006-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
FI-117243-B |
| titleOfInvention |
Method of doping a material and doped material |
| abstract |
A material is doped by depositing at least one dopant deposition layer or a part of a deposition layer on the surface of a material to be doped and/or on the surface of with the atom layer deposition method (ALD method). An independent claim is also included for an apparatus for doping material, comprising a mechanism for the ALD method to provide at least one dopant deposit layer or a part on the surface of the material being doped and/or on the surface of a part or parts by using the atom layer deposition method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2218692-A2 |
| priorityDate |
2004-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |