http://rdf.ncbi.nlm.nih.gov/pubchem/patent/ES-480851-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9ec95f75bc5dcc8f2c6f36fd3ee1ca6
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
filingDate 1979-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1980-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber ES-480851-A1
titleOfInvention PROCEDURE FOR THE MANUFACTURE OF INTEGRATED CIRCUITS.
abstract 1. Process for manufacturing integrated circuits, and / or large-scale integrated circuits, wherein an operation is carried out during which the circuit to be manufactured comprises an article surface and an overlying actinic processing layer consisting essentially of a polymeric material, and wherein the processing layer is patterned and the surface regions of the article, unprotected by the patterned processing layer, are treated with a suitable alteration agent.
priorityDate 1978-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425582611

Total number of triples: 19.