| abstract |
Hard-coated metal, hard metal, cermet or ceramic bodies, coated with a TiSiCN-composite layer or a multilayer layer system containing at least one TiSiCN-composite layer, characterized in that the TiSiCN-composite layer TiSiCN is a nanocomposite layer produced by means of a CVD process without additional plasma excitation, with a halogen content < 1 atom% and an oxygen content < 4 atom%, containing a nanocrystalline phase of TiCxN1- x with 0.1 <= x <= 0.99, with a crystallite size between 5 nm and 150 nm, and a second phase of amorphous SiCxNy with 0.1 <= x <= 0.95 and 0.05 < = and <= 0.9. |