| abstract |
A sensor comprising: at least a first (102, 402) and a second (112, 412) resonator, each of the first (102, 402) and second (112, 412) resonators having a first surface (105, 115) and a second opposing surface (107, 117) and each of the resonators (102, 112, 402, 412) comprising: a lower electrode (104, 114); a piezoelectric layer (106, 116); and an upper electrode (108, 118), where the piezoelectric layer (106, 116) is located between the lower electrode (104, 114) and the upper electrode (108, 118); a stack of Bragg reflectors (415) under the first surfaces (105, 115) of both the first (102, 402) and second (112, 412) resonators; and a layer of molecular recognition component (122, 420) located adjacent to the second surfaces (107, 117) of both the first (102, 402) and second (112, 412) resonators where the at least first (102, 402 ) and second (112, 412) resonator are electrically connected in series. |