| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_520278049ae6d5edd47f3440abdc5a27 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G10K1-064 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G10K1-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 |
| filingDate |
2006-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_084fc2838845e5c7861cc3f4d38e414c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7c78a85f4688a26fce66f8d569e9a98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12863c8a401d6fa2174f3fbbc35afd13 |
| publicationDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
ES-2539397-T3 |
| titleOfInvention |
Procedure and device for plasma treatment on the inner side of hollow bodies |
| abstract |
Method for plasma treatment of hollow-body workpieces, in which a treatment zone is at least partially evacuated within a reactor chamber, a process gas is introduced into the treatment zone , in particular in the workpiece, and by means of radiated electromagnetic energy a plasma is generated in the vicinity of at least part of the surface of the workpiece, characterized in that the plasma during excitation of a gas by means of a Effluvium discharge is ignited in a room (28) separated from the reactor chamber (2) by irradiation of electromagnetic energy in the introduced process gas and by the fact that the process gas during the plasma treatment circulates through the zone of treatment between opposite ends of the zone. |
| priorityDate |
2005-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |