| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_996bb3be43c030355e9c3515c5fc4f08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b43df28f012b376838b0fb63dd2fddfc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-43 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 |
| filingDate |
2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5f3236d47fc6db3dd8d1064ea336200 |
| publicationDate |
2011-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
ES-2356109-T3 |
| titleOfInvention |
FORMULATIONS BASED ON OXOMETALATE ACTIVATED BY PEROXIDE FOR THE ELIMINATION OF ENGRAVING WASTE. |
| abstract |
An alkaline aqueous formulation to combine with peroxide to clean a microelectronic device, the formulation comprising: (a) water, (b) at least one base free of metal ions in amounts sufficient to produce a final formulation having an alkaline pH (c) from about 0.01% to about 5% by weight (expressed as% SiO2) of at least one corrosion inhibitor based on water-soluble metal ion-free silicate; (d) from about 0.01% to about 10% by weight of at least one metal chelating agent, and (e) from more than 0 to about 2.0% by weight of at least one oxomethalate. |
| priorityDate |
2007-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |