http://rdf.ncbi.nlm.nih.gov/pubchem/patent/ES-2143875-T3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa6578ca8d41396c9207713067623ea9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate | 1997-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c31d9ee3ebb6d61ca24924a3bec425e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6b5d471cbb905fc3534cce816d6647c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e5e96e33e6e38d621933a9148f34fde |
| publicationDate | 2000-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | ES-2143875-T3 |
| titleOfInvention | VACUUM COATING INSTALLATION WITH A COATING CHAMBER AND AT LEAST ONE SOURCE CHAMBER. |
| abstract | THE INVENTION IS ABOUT A PARTICULAR DEVICE FOR A LASER INDUCED VACUUM DISCHARGE EVAPORATOR TO DEPOSIT MULTIPLE LAYERS WITH HIGH PURITY AND HIGH DEPOSIT RATES ON LARGE PIECES. IN ACCORDANCE WITH THE INVENTION, THE SUPPLY OF THE MATERIAL IS FOUND FOR THE COATING MATERIAL IN A SUPPLY CHAMBER, WHICH CAN BE SEPARATED AND CAN BE LEFT IN A VACUUM SEALING WITH RESPECT TO THE COATING CHAMBER, WHICH IS FOUND SUBSTRATE TO BE COATED. THE EVAPORATOR MAY, IN PARTICULAR, BE USED FOR THE DEPOSITION OF AMORPHOUS CARBON LAYERS WHICH ARE NOT HYDROGEN AND WHICH ARE SUPERHARD AND / OR CONTAINING HYDROGEN, IN RELATION TO METAL LAYERS OF HIGH PURITY OR FOR REACTIONAL DEPOSITION EXAMPLE, LAYERS OBTAINED THROUGH OXIDATION, CARBURATION, NITRURATION OR CERAMIC LAYERS OR A COMBINATION OF THE LAST TWO. THE CORRESPONDING PLASMA FEEDS CAN BE JOINED WITH APPROPRIATE COATING CHAMBERS AND SO CAN BE COMBINED WITH NORMAL COATING PROCEDURES, P. E. MAGNETRONIC SPRAYING. |
| priorityDate | 1996-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297 |
Total number of triples: 21.