| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_19c77e5966f08f39e8a85fc6ccbaa9ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c98babf0d86f960b139cdb7401f3420f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B6-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B6-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2020-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ec1289d8eb2ea3037010a0a5b8bc2c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f924f4a61f788e21bf30d0c69509787
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bde6426a86f8a4e009fd8da09f53f2fc |
| publicationDate |
2022-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-4052283-A1 |
| titleOfInvention |
Microwave-assisted apparatus, system and method for deposition of films on substrates |
| abstract |
The present invention provides an apparatus for the deposition of thin films on a substrate, including large substrates, held preferably face-down, in a cartridge containing a liquid solution with at least a chemical precursor which, upon being subject to a uniform microwave field transmitted through a microwave-transparent window, leads to the formation of a thin film on the substrate. The present invention also provides a system for launching microwaves and controlling the process for film deposition on the substrate. The present invention also provides a process for obtaining a film of uniform thickness and characteristics on a substrate or for incorporating controlled non-uniformity. The present invention also provides an apparatus and method for film deposition on a series of substrates in a continuous batch process. |
| priorityDate |
2019-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |