| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2020-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00637f4cbedc142ca6b8e4795d8b360f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74f04a0868975a81bfcd76fe80054c15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73a3a11ffe6da795e82be5734bf9f674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bed44f3200d85d6575f9d08518aa3599 |
| publicationDate |
2022-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-4010443-A1 |
| titleOfInvention |
Compositions for tungsten etching inhibition |
| abstract |
The presently claimed invention relates to compositions and methods for inhibition of etching. The presently claimed invention particularly relates to a composition and methods for inhibition of tungsten etching. |
| priorityDate |
2019-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |