http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3964841-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6ac179bcbad17b8ea0260c65f201da92 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-00 |
| filingDate | 2020-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2a82638448b4cc636b3c11ae881876d |
| publicationDate | 2022-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-3964841-A1 |
| titleOfInvention | Measuring apparatus and method for examining an area of a surface of a substrate using a force measuring probe |
| abstract | Measuring apparatus and method for examining a region of a surface of a substrate using a force measuring probe of an atomic force microscope. The atomic force microscope includes a radiation source designed to clean the force-measuring probe and the area of the surface of the substrate to be examined. |
| priorityDate | 2020-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3251760-A1 |
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408 |
Total number of triples: 13.