http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3894534-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
filingDate 2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0e7846e4317e9e5ae53b6ed7d055ce3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9913578638ba8c5fb3cf7ae0367f9ebf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f468b4364209543f3c2ef723dc05d1b
publicationDate 2021-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3894534-A1
titleOfInvention Substrate cleaning solution and method for manufacturing device
abstract To obtain a substrate cleaning solution capable of cleaning a substrate and removing particles. The present invention is a substrate cleaning solution comprising a polymer (A), an alkaline component (B), and a solvent (C), provided that the alkaline component (B) does not comprise ammonia.
priorityDate 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226443881
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94973
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405471
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226450111
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226427421
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226501688
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226487883
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422212
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87069550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226447843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420343
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23703451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411164
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226549671
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408371
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87069549
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID64963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21584169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7618
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20513047
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409665
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058081
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18470673
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8132
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226500329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226642676
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226500328
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93552
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226538131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226434023
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409664
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226536963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77731
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7577
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405959
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3017
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67322
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226501012
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408185
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9237
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID263094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226480831
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226568898
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226407543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226461343

Total number of triples: 109.