| abstract |
A method for fabricating a microfluidic device, comprising:a. Providing an assembly comprising:i. a first silicon substrate having a hydrophilic silicon oxide top surface comprising a microfluidic channel,ii. a second silicon substrate, having a hydrophilic silicon oxide bottom surface directly bonded on the top surface of the first silicon substrate, and comprising fluidic access holes giving fluidic access to the microfluidic channel, andb. Exposing the assembly to oxidative species comprising one or more oxygen atoms and to heat so as to form silicon oxide at a surface of the access holes and of the microfluidic channel. |