| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49f04b1dc6b9fcc2d8b159c5ebee364b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2003-0093 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-36 |
| filingDate |
2019-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bca70915f61935df3db536f66b2f7031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da9e95f1166b49eae7731b6f8be5f224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fe61a6fd06e87194db3d076ab84c618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4191cad6d4caf4fdfa42def34b26632d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d233f1517ad70667c0a1b62357034ee4 |
| publicationDate |
2021-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3832371-A1 |
| titleOfInvention |
Solid immersion lens unit and semiconductor inspection device |
| abstract |
A solid immersion lens unit includes a solid immersion lens having a contact surface for coming into contact with semiconductor device formed of a silicon substrate and a spherical surface to be disposed to face an objective lens; a holder holding the solid immersion lens; and an optical element held by the holder to be positioned between the objective lens and the solid immersion lens. The solid immersion lens transmits light having at least a part of wavelength in a range of 200 nm or greater and 1100 nm or lower. The optical element corrects aberration caused by a difference in refractive indices between the silicon substrate and the solid immersion lens. |
| priorityDate |
2018-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |