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publicationDate 2021-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3822327-A1
titleOfInvention Polishing slurry and method of manufacturing semiconductor device
abstract A polishing slurry including a fullerene derivative and at least one compound having at least one positively-charged functional group, and a method of manufacturing a semiconductor device using the polishing slurry.
priorityDate 2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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