http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3800672-A1

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filingDate 2019-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3800672-A1
titleOfInvention Visible-swir hyper spectral photodetectors with reduced dark current
abstract A method includes forming an assembly of layers including an InP cap layer on an InGaAs absorption region layer, wherein the InGaAs layer is on an n-InP layer, and wherein an underlying substrate layer underlies the n-InP layer. The method includes removing a portion of the InP cap and n-InP layer by dry etching.
priorityDate 2019-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 24.