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filingDate 2019-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23f525c7d9b2ff650d327b08c33e679b
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publicationDate 2021-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3767666-A1
titleOfInvention Cleaning solution for removing dry etching residue and method for manufacturing semiconductor substrate using same
abstract The present invention can provide a cleaning solution containing 0.2-20 mass% of an amine compound (A), 40-70 mass% of a water-soluble organic solvent (B), and water, wherein the amine compound (A) contains at least one selected from the group consisting of n-butylamine, hexylamine, octylamine, 1,4-butanediamine, dibutylamine, 3-amino-1-propanol, N,N-diethyl-1,3-diaminopropane, and bis(hexamethylene)triamine, and the water-soluble organic solvent (B) has a viscosity of 10 mPa·s or less at 20°C and a pH of 9.0-14.
priorityDate 2018-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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