http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3764393-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033 |
| filingDate | 2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a61e53769f8d13ed96746431120e6547 |
| publicationDate | 2021-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-3764393-A1 |
| titleOfInvention | Method for forming trenches |
| abstract | In one aspect, there is provided a method of forming the trenches (100a) for forming insulation trenches, the method comprising the following steps: - Provide a stack comprising at least the substrate (10), a first hard mask layer (11) and a second hard mask layer (12), - Making at least a first opening (111) and a second opening (112), by performing isotropic engravings; - Carry out a third anisotropic etching of the substrate (10) in line with the second opening (112), so as to obtain at least one trench (100a), - Carry out a fourth isotropic etching of the first layer (11) so as to widen the first opening (111) and obtain a first widened opening (111 '), - Carry out a fifth, anisotropic etching so as to simultaneously widen the second opening (112) and increase the depth of the trench (100a). |
| priorityDate | 2019-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.