http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3761346-A1

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F7-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
filingDate 2019-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ee9fc3943d599718b600f24b043ff42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_155796256a1b7235f2c8cdb2db3c6509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19c38fd722cb053eda940510dc76660a
publicationDate 2021-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3761346-A1
titleOfInvention Protective fluid for alumina, protection method, and production method for semiconductor substrate having alumina layer using same
abstract The present invention pertains to a protective fluid for alumina, a protection method, and a production method for semiconductor substrate having an alumina layer using same. This alumina protective fluid is characterized by: containing 0.0001%-20% by mass of an alkali earth metal compound; and the alkali earth metal being at least one selected from the group consisting of beryllium, magnesium, strontium, and barium. As a result of the present invention, alumina corrosion can be suppressed during the production process for semiconductor circuits.
priorityDate 2018-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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