| abstract |
The present invention relates to novel aromatic amino-functional siloxanes, which are compounds comprising one or two X 2 tail groups, and a L-linking group of structure (2) connecting each tail group to said leader group, the group of head X having a structure (1), containing an optional organic fraction Y, the point of attachment of said tail group X 2 by said linkage group L to the head group X 1 , which can be, at positions a, b, c, d, or e. Another aspect of the present invention relates to compositions containing the novel aromatic amino functional siloxanes. In another aspect, the present invention relates to compositions comprising said novel aromatic amino-functional siloxanes, as well as composition resulting from aging of these compositions at room temperature for about 1 day to about 4 weeks. According to still other aspects, the present invention relates to methods of forming self-assembled monolayers on a substrate from the aged composition, and methods of coating these aged compositions on patterned porous dielectrics to cover them, as well as metallization processes of these porous dielectrics with covered patterns. |