| abstract |
This invention relates to all-solid thin-film energy sources, in particular, thin-film pseudo-capacitors having a Li + ion-conducting inorganic electrolyte, for micro-devices such as devices in the Internet of Things. objects, micro-sensors, micro-electromechanical systems, microfluidic chip elements, RFID tags, etc., as well as for the field of micro-electronic energy recovery, ultra-light energy storage solutions and medical devices. The power source comprises: a substrate; two layers of current collector; two layers buffer / cache; an electrolyte layer in the solid state; a protection layer, each of the two buffer / cache layers being a Li X M Y O 3 layer, where M is any of Nb, Ta, Ti and V, X is in a range of 0 , 8 to 1.4, and Y is in the range of 1.2 to 0.6. |