| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8ace3886ad985680695e66f92b53552 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-16 |
| filingDate |
2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ec667078739239982f8fce8ebb5d789
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab44f3e436a578eead27d32a433800b2 |
| publicationDate |
2020-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3667333-A2 |
| titleOfInvention |
Probe, method, device and computer program for producing a probe for scanning probe microscopes |
| abstract |
The present invention relates to a method for producing a probe for a scanning probe microscope with the following steps: particle beam-induced generation and / or processing of a probe tip on a substrate; wherein a time-changing interaction position of a particle beam is controlled in such a way that a lateral surface of a base region of the probe tip produced and / or processed has a negative curvature. |
| priorityDate |
2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |