http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3666926-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01025
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25C1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G45-12
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-32
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-20
filingDate 2019-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73c8a2bf46640b5ce057f5de9f27e830
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc30d5b7e490d39e045b2c1b58a7aead
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba05ac0c5d93a5f57b1cf892c19c15ce
publicationDate 2020-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3666926-A1
titleOfInvention Methods of generating manganese (iii) ions in mixed aqueous acid solutions using ozone
abstract Manganese-(III) species is generated and regenerated in a mixed aqueous acid solution containing manganese-(II) species by injecting ozone gas in the mixed aqueous acid solution such that ozone oxidizes at least some of the manganese-(II) species to the manganese-(III) species with at least 60% Mn(III) generation efficiency. The acids include sulfuric acid and an alkane sulfonic acid. The aqueous acid solution containing manganese-(III) and manganese-(II) species is used to etch polymer materials. The etch is a chrome-free etch method.
priorityDate 2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011140035-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2792702-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8603352-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86280046
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53730586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87064942
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405637
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058724
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86280045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11769653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226693876
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408366
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5459844
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87059152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18938679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62696
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405794
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20549084
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226465678
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409096
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54676860
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3085412
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8560
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227129358
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87060278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226417651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226465679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226417056
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226465773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID168521
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412769
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID46737759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID155116
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393724

Total number of triples: 79.