Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01025 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25C1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G45-12 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-32 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-20 |
filingDate |
2019-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73c8a2bf46640b5ce057f5de9f27e830 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc30d5b7e490d39e045b2c1b58a7aead http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba05ac0c5d93a5f57b1cf892c19c15ce |
publicationDate |
2020-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-3666926-A1 |
titleOfInvention |
Methods of generating manganese (iii) ions in mixed aqueous acid solutions using ozone |
abstract |
Manganese-(III) species is generated and regenerated in a mixed aqueous acid solution containing manganese-(II) species by injecting ozone gas in the mixed aqueous acid solution such that ozone oxidizes at least some of the manganese-(II) species to the manganese-(III) species with at least 60% Mn(III) generation efficiency. The acids include sulfuric acid and an alkane sulfonic acid. The aqueous acid solution containing manganese-(III) and manganese-(II) species is used to etch polymer materials. The etch is a chrome-free etch method. |
priorityDate |
2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |