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filingDate 2017-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3552230-A1
titleOfInvention Power semiconductor devices having gate trenches with implanted sidewalls and related methods
abstract Semiconductor devices include a semiconductor layer structure having a wide band-gap semiconductor drift region having a first conductivity type. A gate trench is provided in an upper portion of the semiconductor layer structure, the gate trench having first and second opposed sidewalls that extend in a first direction in the upper portion of the semiconductor layer structure. These devices further include a deep shielding pattern having a second conductivity type that is opposite the first conductivity type in the semiconductor layer structure underneath a bottom surface of the gate trench, and a deep shielding connection pattern that has the second conductivity type in the first sidewall of the gate trench. The devices include a semiconductor channel region that has the first conductivity type in the second sidewall of the gate trench.
priorityDate 2016-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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