| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6409e25ad5decbd043ed7439fbf842ed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-536 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
| filingDate |
2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f6eb81a85360ff1820ff1b34694203f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80d3fef7296c44e087f99454a17c9f24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65c0ff6160d5db36e8d48aaaab7969b6 |
| publicationDate |
2019-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3497439-A1 |
| titleOfInvention |
Acoustic resonator device with controlled placement of functionalization material |
| abstract |
A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided. |
| priorityDate |
2016-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |