| abstract |
Silicon-carbon composite powder, wherein na) Si and C are distributed throughout the particle and nb) the ratio by weight of (C/Si) surface on the surface of a particle is greater than the ratio by weight of (C/Si) total within the total particle. n It is produced by simultaneously feeding into a reactor a gaseous stream of a SiH 4 , Si 2 H 6 , Si 3 H 8 and/or organosilane and a gaseous stream of at least one hydrocarbon selected from the group consisting of ethylene, ethane, propane and acetylene and reacting the streams using plasma enhanced chemical vapor deposition. |