Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ead8fbc0650beeb81440fadd46a6cf21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-349 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3765 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-662 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-722 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3427 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 |
filingDate |
2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2022-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ab1f1deac28bb5be8d98ba164ee46d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67a0c0214e4b9e13a30a57076f9350e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97b6876488f70267416ba66236c188b9 |
publicationDate |
2022-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-3385363-B1 |
titleOfInvention |
A post chemical-mechanical-polishing (post-cmp) cleaning composition comprising a specific sulfur-containing compound |
priorityDate |
2012-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |