| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6409e25ad5decbd043ed7439fbf842ed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 |
| filingDate |
2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c16bed343837824859b28059900d831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_500101a9785ff694787c464c5158e34c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f6eb81a85360ff1820ff1b34694203f |
| publicationDate |
2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3371583-A1 |
| titleOfInvention |
Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization |
| abstract |
A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with a low water permeability hermeticity layer and an interface layer including a material (e.g., gold or a hydroxylated oxide surface) suitable for receiving a self-assembled monolayer (SAM) that may be functionalized with a functionalization (e.g., specific binding) material, with the foregoing layers being designed to have insubstantial impact on sensor performance. Atomic layer deposition may be used for deposition of the hermeticity and/or interface layers. The hermeticity layer protects the electrode material from attack in corrosive liquid environments, and the interface layer facilitates proper chemical binding of the SAM. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided. |
| priorityDate |
2015-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |