Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f56b5174f7d196258707ccf1d609796e |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823871 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05F1-625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7624 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03K17-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-02 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
filingDate |
2017-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf97547e46b8a2bdbbaab6f43e6b80cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a081e9055011b3eaf4acd36266d32c5 |
publicationDate |
2018-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-3321963-A3 |
titleOfInvention |
Semiconductor device |
abstract |
Reliability of a semiconductor device is improved. A p-type MISFET (Qp1) of a thin film SOI type is formed in an SOI substrate including a semiconductor substrate, an insulating layer (BX) on the semiconductor substrate, and a semiconductor layer (SM) on the insulating layer, and p + -type semiconductor regions (SDP) which are source and drain region of the p-type MISFET are formed in the semiconductor layer and an epitaxial layer (EP) on the semiconductor layer. A semiconductor layer (GN) is formed via the insulating layer below the p-type MISFET formed in the n-type well region (NW1) of the semiconductor substrate. In an n-type tap region (NTAP) which is a power supply region of the n-type well region, a silicide layer (SL) is formed on a main surface of the n-type well region without interposing the epitaxial layer therebetween. |
priorityDate |
2016-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |