http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3317886-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af16c1f266da025c51b2220719b4c01 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K2201-067 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-062 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-06 |
| filingDate | 2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40463fc641b67d218fc7adaf388f35fe |
| publicationDate | 2018-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-3317886-A1 |
| titleOfInvention | Coatings for extreme ultraviolet and soft x-ray optics |
| abstract | Coatings for use in the extreme ultraviolet / soft X-ray spectrum/DUV from 0.1nm to 250nm include one or more sub-wavelength "A-layers" alternating with sub-wavelength "B-layers." The A-layers may include Group 1, Group 2 and Group 18 materials. The B-layers may include transition metal, lanthanide, actinide, or one of their combinations. The A-layers and/or the B-layers may include nanostructures with features sized or shaped similarly to expected defects. Additional top layers may include higher-atomic-number A-layer materials, hydrophobic materials, or charged materials. Such a material may be used to make components such as mirrors, lenses or other optics, panels, lightsources, photomasks, photoresists, or other components for use in applications such as lithography, wafer patterning, astronomical and space applications, biomedical, biotech applications, or other applications. |
| priorityDate | 2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.