| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa6e4421d9e1159b6012d9bf702be572 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 |
| filingDate |
2016-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09aa2a5254caf70e5fb6a37d221b5218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa622f0890fcfd7a00db55b1e6e50b79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49f7811a40b7935adbedd59f402394a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9d2e4af85a34e942c1f002ab64d4fe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_666bb45e4ddc60bbf0f2aedebef64b1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2a6484816068a2171611a9ce1c93d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db1d17d38ff6776abe5067eb861df0d0 |
| publicationDate |
2018-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3296424-A1 |
| titleOfInvention |
Chemical vapor deposition starting material comprising heterogeneous polynuclear complex, and chemical vapor deposition method using said chemical vapor deposition starting material |
| abstract |
The present invention relates to a chemical deposition raw material including a heterogeneous polynuclear complex in which a cyclopentadienyl and a carbonyl are coordinated to a first transition metal and a second transition metal as central metals, the chemical deposition raw material being represented by the following formula. In the following formula, the first transition metal (M 1 ) and the second transition metal (M 2 ) are mutually different. The number of cyclopentadienyls (L) is 1 or more and 2 or less, and to the cyclopentadienyl is coordinated one of a hydrogen atom and an alkyl group with a carbon number of 1 or more and 5 or less as each of substituents R 1 to R 5 . With the chemical deposition raw material of the present invention, a composite metal thin film or a composite metal compound thin film containing plural metals can be formed from a single raw material. |
| priorityDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |