| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-00 |
| filingDate |
2017-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_524ff0b5b889ea19595d61d6a77c30ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a89b33bb22f14698df135d807257c7d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa9d1d71c66a57b32c311a000970d33f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cea79019e00721e86f438c28dc5fd75 |
| publicationDate |
2018-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3263667-A1 |
| titleOfInvention |
Additives for barrier chemical mechanical planarization |
| abstract |
A barrier chemical mechanical planarization polishing composition is provided that includes suitable chemical additives. The suitable chemical additives are silicate compound and high molecular weight polymers/copolymers. There is also provided a chemical mechanical polishing method using the barrier chemical mechanical planarization polishing composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11180678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3647384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11732157-B2 |
| priorityDate |
2016-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |