| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-5435 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-5435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5ad8cccd5c57dcd6928fd2f98e6e9bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00637f4cbedc142ca6b8e4795d8b360f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7b00f2a0853b2be512f3fede3430d16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80d5ed8b51207c47e350942487e7fed8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17fdd1fe67be62d7acc0db72020fddb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88e44ad8fa6c8d11c6b2a7c7b658b8df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c731dc1d3fb9618e5c80a21cdf73611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bed44f3200d85d6575f9d08518aa3599
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bc307fb60236904b732d210fba663dc |
| publicationDate |
2019-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3237563-B1 |
| titleOfInvention |
Use of a chemical mechanical polishing (cmp) composition for polishing of cobalt and / or co-balt alloy comprising substrates |
| priorityDate |
2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |