| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_caac20d835e3bf292b56f9be4f8f5b95 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-213 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2015-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cb80669cbd4669b68c22f0169575fa5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46e4db8c23bd4d292dc13d919118db35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e408f162dd196e6b0d6ba51ce8782e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24581aa08f2b70e9d853c2478afa1c96 |
| publicationDate |
2017-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3221897-A1 |
| titleOfInvention |
Metallic gratings and measurement methods thereof |
| abstract |
There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating. |
| priorityDate |
2014-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |