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filingDate 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a0b9d126c2418234755f3ca8dec2dad
publicationDate 2017-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3217421-A1
titleOfInvention Device for surface treating substrates
abstract The present invention relates to a device for Surface treatment of a substrate surface (10) of a substrate (1) with: - A process chamber for receiving the substrate (1) and - Means for amorphizing the substrate surface (1o) to form an amorphous layer (2, 2 ', 2 ") on the substrate surface (1o) with a thickness d> 0nm of the amorphous layer (2, 2', 2").
priorityDate 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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