| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc83a8e9c8657673a8a82bf251916517 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-73 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-443 |
| filingDate |
2015-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6413e58b7cb27ac24b74af90b931be62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57d3527bc23aad394ae11c4bca4d9b7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef7ac396d8558151b86f22b00acabd4a |
| publicationDate |
2017-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3204741-A2 |
| titleOfInvention |
Method for detecting and analyzing surface films |
| abstract |
Disclosed herein are embodiments of a novel method and system to analyze films using plasma to produce spectral data and analyzing the spectral data. |
| priorityDate |
2014-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |