http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3184669-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8401bd1a86a10d5508942a53475fc38
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0789
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0796
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
filingDate 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e04b42019e0d0f03e18ec40b186a1dce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1294469d1b52573e0885beaa3e426a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8690870c890e9d0901e2bb98f1c0e89b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ad430e054e068e2dd67edacf8a77fb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_874115ed4a4724c7fc207033f2b48fa0
publicationDate 2018-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3184669-B1
titleOfInvention Etching solution for copper and copper alloy surfaces
priorityDate 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID103689
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448799876
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457558965
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453265332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360350
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415713188
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12748
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452826178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90473022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24480
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515638
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82240
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29936
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25514
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24826
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410441979
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452506218
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24375
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1032
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416290473
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451911410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87425
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8705
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447566935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559212
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451188631
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451095370
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411021330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416645804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID444361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431577255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5362485
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26037
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450750189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451547506
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733981
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414864024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454110207
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10129897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458396401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903350
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1639
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451733884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453575137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452862991
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413807576
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID259
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452190657
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16211566
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6343
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24592
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID253881
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409432810
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450622589
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23326022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393661
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449242757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6102343
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449949725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101615372
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24610
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21125375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406908050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447544793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24293
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397808
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410135424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451812792
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419533227
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24385
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID312
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422905756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393705
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66412
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407631466
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419698070
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449973617
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415809126
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393726
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360316
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454248471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450980184
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3032536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449743155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393732
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453608009
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10220139
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164887
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393713
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138107
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414170355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420207592
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164826

Total number of triples: 166.