Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523e5f0c7418f04134cf08ce1d859e56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9910d2a9f014e2c531f5fe4e48ac8589 |
publicationDate |
2017-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-3159915-A1 |
titleOfInvention |
Method for polishing silicon wafer, polishing composition, and polishing composition set |
abstract |
Provided is a method for polishing a silicon wafer that can effectively obtain a high-grade surface. The method for polishing a silicon wafer includes an intermediate polishing step of polishing a silicon wafer with a polishing slurry Sp containing abrasive grains and a final polishing step of polishing the silicon wafer with a polishing slurry Sf containing abrasive grains. The polishing slurry Sp has a relative haze Hp greater than a relative haze Hf of the polishing slurry Sf and less than 6.8 times as high as the relative haze Hf of the polishing slurry Sf. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3950877-A4 |
priorityDate |
2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |