http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3158323-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8438 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55 |
| filingDate | 2015-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72a9e04815360bfd981335bd0ff39bfe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4488dc6f279c00702987695a27ada877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc63f1a74c5273d175d7572737469596 |
| publicationDate | 2017-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-3158323-A1 |
| titleOfInvention | Arrangement for determining the characteristics and/or parameters of a sample and/or of at least one layer formed on or in a surface of a sample |
| abstract | The invention relates to an arrangement for determining characteristics and/or parameters of a sample and/or of at least one layer formed on a surface of a sample. A plurality of detectors, designed for the spatially resolved spectral analysis of electromagnetic radiation within a wavelength interval, are thereby arranged in rows or in a row and column arrangement. The detectors are connected to an electronic evaluation unit and arranged such that electromagnetic radiation emitted from a broadband radiation source is incident on the detectors either after being reflected by the surface of the sample, by a layer formed on the sample, or by the surface of a layer within the sample, and/or after passing through a sample transparent to the electromagnetic radiation. The irradiation is carried out such that a homogenous intensity of the electromagnetic radiation is maintained on a surface, by which the electromagnetic radiation is reflected or through which said radiation is transmitted. The electronic evaluation unit is designed such that the spatially-resolved and wavelength-resolved measurement signals detected by the detectors within a wavelength interval are compared with a theoretical wavelength-dependent progression of the respective radiation intensities obtained through simulation or with a progression obtained by calibration on at least one known sample, in order to obtain information for determining at least one characteristic or at least one parameter of the sample or at least one layer formed on or in the sample for the measurement position detected, and thus the spatially-resolved distribution of at least one characteristic or at least one parameter of the sample or at least one layer formed on or in the sample. |
| priorityDate | 2014-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4911 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395793 |
Total number of triples: 21.