| abstract |
A circuit member including: an element having a functional region; a tabular cover disposed opposite to the functional region; and a rib formed to surround the functional region, for providing a space between the functional region and the cover. The cover includes a sheet S having a thickness of 100 µm or less. The sheet S has a tensile elastic modulus Es at 175°C of 10GPa or more. The tensile elastic modulus Es at 175°C of the sheet S is preferably 20GPa or more. |