| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1229111a198f86af4112ecd730b55cd9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-167 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D46-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-16 |
| filingDate |
2014-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7739b51872c39f2f93d9d6ea03f46bc |
| publicationDate |
2016-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3063092-A1 |
| titleOfInvention |
Process for producing polycrystalline silicon |
| abstract |
The invention relates to a method for producing polycrystalline silicon, comprising a deposition of polycrystalline silicon on a carrier body in order to obtain a polycrystalline silicon rod, or a deposition of polycrystalline silicon on silicon particles in order to obtain polycrystalline silicon granules, wherein each deposition takes place in a reactor located in a class 1-100 000 cleanroom into which filtered air is directed. For filtration, said air first passes through at least one filter that removes particles greater than or equal to 1 μm, and subsequently passes through a HEPA filter that removes particles smaller than 1 μm. |
| priorityDate |
2013-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |